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University of Illinois at Urbana-Champaign

Electrochemical vapor deposition of yttria stabilized zirconia on porous graphite substrates

Abstract

dc:description

The main goal of this study was to deposit stabilized zirconia films on a porous graphite substrate by electrochemical vapor deposition using CO as the oxidizing agent. Five experimental variables, deposition temperature, deposition time, gas flow rate, anode H$\sb2$/Ar ratio, and substrate porosity were varied to investigate their effect on EVD process.

Degree

thesis:*
Name thesis:degree_name
Ph.D.
Level thesis:degree_level
Dissertation
Discipline thesis:degree_discipline
Materials Science Engineering
Grantor
University of Illinois at Urbana-Champaign
Year dc:date
2011

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Shiau, Lih-Farn
Contributors dc:contributor
  • Wirtz, Gerald P.

Subjects

dc:subject × 3

Rights

dc:rights
Statement dc:rights
  • Copyright 1993 Shiau, Lih-Farn
Language dc:language
eng

Identifiers

dc:identifier.*
Identifier
AAI9329161
(UMI)AAI9329161
OAI identifier oai:identifier
oai:www.ideals.illinois.edu:2142/19581

Chain of custody

source
Harvested from
University of Illinois - Urbana-Champaign
Base URL
www.ideals.illinois.edu/oai-pmh
Last updated
2026-07-22
Source record
OAI-PMH GetRecord
citation

Shiau, Lih-Farn. Electrochemical vapor deposition of yttria stabilized zirconia on porous graphite substrates. Dissertation thesis, University of Illinois at Urbana-Champaign, 2011. http://hdl.handle.net/2142/19581