Electrochemical vapor deposition of yttria stabilized zirconia on porous graphite substrates
type: CreativeWork
description: The main goal of this study was to deposit stabilized zirconia films on a porous graphite substrate by electrochemical vapor deposition using CO as the oxidizing agent. Five experimental variables, deposition temperature, deposition time, gas flow rate, anode H$\sb2$/Ar ratio, and substrate porosity were varied to investigate their effect on EVD process.
abstract: The main goal of this study was to deposit stabilized zirconia films on a porous graphite substrate by electrochemical vapor deposition using CO as the oxidizing agent. Five experimental variables, deposition temperature, deposition time, gas flow rate, anode H$\sb2$/Ar ratio, and substrate porosity were varied to investigate their effect on EVD process.
author: Shiau, Lih-Farn
language: eng
keywords: Chemistry, Inorganic, Engineering, Chemical, Engineering, Materials Science
date published: 2011-05-07T12:12:06Z
date modified: 2026-07-22T22:25:14Z
provider: University of Illinois - Urbana-Champaign
publisher: Networked Digital Library of Theses and Dissertations
type: WebPage
source organization: University of Illinois at Urbana-Champaign

PropertyValue
property ID: Handle
value: http://hdl.handle.net/2142/19581