Back to results
University of Illinois at Urbana-Champaign
Growth, properties and electronic stability of DC magnetron reactive sputtered hydrogenated amorphous silicon thin films
Abstract
dc:descriptionRestriction data tranferred 2014-07-01T11:15:22-05:00 Original Data Group with Access UIUC Users [automated] Release Date: none Reason: ETDs are only available to UIUC Users without author permission
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Materials Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2011
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Pinarbasi, Mustafa
- Contributors dc:contributor
-
- Kushner, Mark J.
Subjects
dc:subject × 1Rights
dc:rights- Statement dc:rights
-
- Copyright 1989 Pinarbasi, Mustafa
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
-
AAI8924920
(UMI)AAI8924920 - OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/19494