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University of Illinois at Urbana-Champaign
Fabrication of nanostructures with the scanning tunneling microscope and the laser
Abstract
dc:descriptionA technique of making nanometer-scale structures on surfaces is developed. The technique combines two of the most advanced technologies: the laser and the scanning tunneling microscope (STM). Laser radiation is used to break the chemical bonds of gas-phase trimethylaluminum molecules to free aluminum atoms in the region of the tunneling gap of the STM. The atoms are subsequently selectively excited and ionized. The ions are then driven softly toward the surface where they are deposited by the field in the tunneling gap of the microscope. Deposits as small as 1nmx1nm were made on graphite substrates. The technique is also capable of addressable erasing.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Electrical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2011
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Yau, Siu-Tung
- Contributors dc:contributor
-
- Nayfeh, Munir H.
Subjects
dc:subject × 1Rights
dc:rights- Statement dc:rights
-
- Copyright 1991 Yau, Siu-Tung
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
-
AAI9136773
(UMI)AAI9136773 - OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/19396