Growth, physical properties, and nanostructuring of epitaxial metastable hafnium aluminum nitride

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Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Materials Science & Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2011

Author dc:creator

• Howe, Brandon M.

Contributors dc:contributor

• Petrov, Ivan G.
• Greene, Joseph E.
• Rockett, Angus A.
• Zuo, Jian-Min

• hafnium aluminum nitride (HfAlN)
• hard coatings
• thin films
• sputtering
• nanostructure

Statement dc:rights

• Copyright 2010 Brandon Marcus Howe

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/18339

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/18339