Aluminum/aluminum oxide structured microplasma devices: Paschen's Law and applications

Aluminum/aluminum oxide microplasma novel devices can be fabricated by sequences of inexpensive wet electrochemical processes and provide an attractive tool to study plasma physics by modifying the device geometry as desired. A wet electrochemical process, used for fabricating microscale cavities and developed at the Laboratory for Optical Physics and Engineering, provides an opportunity to investigate plasma characteristic dimensions decreasing toward ~ 1 μm. In this thesis, basic background of the plasma physics and experimental techniques necessary for fabricating structured Al/Al2O3 devices is presented. In order to better understand and predict device performance as the characteristic dimensions decrease toward ~1 μm, a specific experiment regarding the ignition voltage as a function of various device geometries and gas pressures is performed. The goal of this study is to determine if the fabricated Al/Al2O3 devices obey Paschen’s Law.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Electrical & Computer Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2010

Author dc:creator

• Yoon, Jekwon

Contributors dc:contributor

• Eden, James G.

• Paschen's law
• Aluminum oxide
• microplasma

Statement dc:rights

• Copyright 2010 Jekwon Yoon

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/16481

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/16481