Substrate dependance, temperature dependance and temperature sensitivity and resolution of doped-silicon microcantilevers

This thesis aims to characterize microcantilevers with integrated heater-thermometers. This research concentrates on characterization for use in data storage, sensing, surface science, and nano-manufacturing. The rst objective seeks to understand the speci c thermal interactions between a heated microcantilever tip and various substrates. The experiments investigate thermal conductance, thermal time constant, and temperature-dependant adhesion force between and cantilever tip and substrates of silicon, quartz, and polyimide. The second objective is to utilize a heated microcantilever as a heater-thermometer. The experiments investigate the thermal calibration sensitivity and resolution under steady and periodic conditions near room-temperature. The results were compared to the Raman spectroscopy, which measures the local temperature at the cantilever tip.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2010

Author dc:creator

• Corbin, Elise Anne

Contributors dc:contributor

• King, William P.

• Atomic Force Microscopy (AFM)
• cantilever
• Heated microcantilevers
• Temperature
• Sensitivity
• Resolution
• Raman
• Spectroscopy

Statement dc:rights

• Copyright 2009 Elise A. Corbin

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/14618

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/14618