{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/14618"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/14618","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Substrate dependance, temperature dependance and temperature sensitivity and resolution of doped-silicon microcantilevers","abstract":"This thesis aims to characterize microcantilevers with integrated heater-thermometers. This research concentrates on characterization for use in data storage, sensing, surface science, and nano-manufacturing. The rst objective seeks to understand the speci c thermal interactions between a heated microcantilever tip and various substrates. The experiments investigate thermal conductance, thermal time constant, and temperature-dependant adhesion force between and cantilever tip and substrates of silicon, quartz, and polyimide. The second objective is to utilize a heated microcantilever as a heater-thermometer. The experiments investigate the thermal calibration sensitivity and resolution under steady and periodic conditions near room-temperature. The results were compared to the Raman spectroscopy, which measures the local temperature at the cantilever tip.","abstract_html":"This thesis aims to characterize microcantilevers with integrated heater-thermometers. This research concentrates on characterization for use in data storage, sensing, surface science, and nano-manufacturing. The rst objective seeks to understand the speci c thermal interactions between a heated microcantilever tip and various substrates. The experiments investigate thermal conductance, thermal time constant, and temperature-dependant adhesion force between and cantilever tip and substrates of silicon, quartz, and polyimide. The second objective is to utilize a heated microcantilever as a heater-thermometer. The experiments investigate the thermal calibration sensitivity and resolution under steady and periodic conditions near room-temperature. The results were compared to the Raman spectroscopy, which measures the local temperature at the cantilever tip.","abstract_has_math":false,"creators":["Corbin, Elise Anne"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["King, William P."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2010,"date_issued":"2010-01-06T16:19:50Z","date_published":"2010-01-06T16:19:50Z","updated_at":"2026-07-22T22:25:07Z","subjects":["Atomic Force Microscopy (AFM)","cantilever","Heated microcantilevers","Temperature","Sensitivity","Resolution","Raman","Spectroscopy"],"languages":["en"],"rights":["Copyright 2009 Elise A. 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