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University of Illinois Urbana-Champaign

Feedthrough-immune frequency tracking of electrostatic MEMS resonators

dc:creator Yan, Jie

thesis:degree_name M.S.

dc:date2025

Abstract

dc:description

Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-05-01

Degree

thesis:*

Name thesis:degree_name: M.S.
Level thesis:degree_level: Thesis
Discipline thesis:degree_discipline: Electrical & Computer Engr
Grantor: University of Illinois Urbana-Champaign
Year dc:date: 2025

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Yan, Jie
Contributors dc:contributor: Bahl, Gaurav

Subjects

dc:subject × 3

Rights

dc:rights

Statement dc:rights: Copyright 2025 Jie Yan
Language dc:language: en, eng

Identifiers

dc:identifier.*

Handle dc:identifier: https://hdl.handle.net/2142/129591
OAI identifier oai:identifier: oai:www.ideals.illinois.edu:2142/129591

Chain of custody

source

Harvested from: University of Illinois - Urbana-Champaign
Base URL: www.ideals.illinois.edu/oai-pmh
Last updated: 2026-07-22
Source record: OAI-PMH GetRecord

related terms

citation

Yan, Jie. Feedthrough-immune frequency tracking of electrostatic MEMS resonators. Thesis thesis, University of Illinois Urbana-Champaign, 2025. https://hdl.handle.net/2142/129591

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