{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/129591"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/129591","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Feedthrough-immune frequency tracking of electrostatic MEMS resonators","abstract":"Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-05-01","abstract_html":"Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-05-01","abstract_has_math":false,"creators":["Yan, Jie"],"institution":"University of Illinois Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Electrical & Computer Engr","degree_department":null,"school":null,"contributors":["Bahl, Gaurav"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2025,"date_issued":"2025-04-28","date_published":"2025-04-28","updated_at":"2026-07-22T22:25:05Z","subjects":["MEMS resonator","Frequency tracking","Feed-through"],"languages":["en","eng"],"rights":["Copyright 2025 Jie Yan"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://hdl.handle.net/2142/129591","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Bahl, Gaurav"]},{"key":"dc:creator","label":"Author","values":["Yan, Jie"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2025-04-28","2025-05"]},{"key":"dc:type","label":"Dc Type","values":["text","Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical & Computer Engr"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["MEMS resonator","Frequency tracking","Feed-through"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en","eng"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2025 Jie Yan"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://hdl.handle.net/2142/129591"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-05-01","The student, Jie Yan, accepted the attached license on 2025-04-28 at 11:33.","The student, Jie Yan, submitted this Thesis for approval on 2025-04-28 at 11:55.","This Thesis was approved for publication on 2025-04-28 at 12:37.","DSpace SAF Submission Ingestion Package generated from Vireo submission #22030 on 2025-10-19 at 19:16:23","This thesis introduces a novel dual-tone tracking scheme for MEMS resonators. Timing references are essential in modern technology, including communication, navigation, and daily electronics. While phase-locked loops and self-sustaining oscillators are commonly used for resonator frequency tracking, MEMS resonators introduce unique challenges, such as amplitude-frequency (A-F) effects, bias sensitivity, and feedthrough, which degrade tracking performance and stability. Inspired by the Pound-Drever-Hall (PDH) technique [1], this dual-tone tracking approach effectively mitigates these issues. By leveraging dual-tone subtraction, feedthrough is eliminated, isolating the resonator’s eigenfrequency. The scheme employs frequency conversion techniques to generate an odd-symmetric error signal centered around resonance, crossing zero precisely at the target resonance frequency. This signal is used in a feedback loop to lock a voltage-controlled oscillator (VCO) to the MEMS resonator without requiring additional reference voltage. A ∼1 MHz double-ended tuning fork (DETF) resonator was tested, demonstrating real-time frequency tracking under ambient temperature variations. The observed temperature hysteresis underscores the importance of dual-mode thermometry techniques, which utilize the resonant frequency of one mode as a temperature sensor. To address this, the proposed frequency tracking scheme is also integrated into a dual-mode temperature compensation system. Additionally, experiments conducted under low bias and drive conditions confirm the effectiveness of the feedthrough-immune approach. These findings represent a promising step toward the realization of long-term stable MEMS clocks."]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Feedthrough-immune frequency tracking of electrostatic MEMS resonators"]}]}],"canonical_facts":{"dc:contributor":["Bahl, Gaurav"],"dc:creator":["Yan, Jie"],"dc:date":["2025-04-28","2025-05"],"dc:description":["Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-05-01","The student, Jie Yan, accepted the attached license on 2025-04-28 at 11:33.","The student, Jie Yan, submitted this Thesis for approval on 2025-04-28 at 11:55.","This Thesis was approved for publication on 2025-04-28 at 12:37.","DSpace SAF Submission Ingestion Package generated from Vireo submission #22030 on 2025-10-19 at 19:16:23","This thesis introduces a novel dual-tone tracking scheme for MEMS resonators. Timing references are essential in modern technology, including communication, navigation, and daily electronics. While phase-locked loops and self-sustaining oscillators are commonly used for resonator frequency tracking, MEMS resonators introduce unique challenges, such as amplitude-frequency (A-F) effects, bias sensitivity, and feedthrough, which degrade tracking performance and stability. Inspired by the Pound-Drever-Hall (PDH) technique [1], this dual-tone tracking approach effectively mitigates these issues. By leveraging dual-tone subtraction, feedthrough is eliminated, isolating the resonator’s eigenfrequency. The scheme employs frequency conversion techniques to generate an odd-symmetric error signal centered around resonance, crossing zero precisely at the target resonance frequency. This signal is used in a feedback loop to lock a voltage-controlled oscillator (VCO) to the MEMS resonator without requiring additional reference voltage. A ∼1 MHz double-ended tuning fork (DETF) resonator was tested, demonstrating real-time frequency tracking under ambient temperature variations. The observed temperature hysteresis underscores the importance of dual-mode thermometry techniques, which utilize the resonant frequency of one mode as a temperature sensor. To address this, the proposed frequency tracking scheme is also integrated into a dual-mode temperature compensation system. Additionally, experiments conducted under low bias and drive conditions confirm the effectiveness of the feedthrough-immune approach. These findings represent a promising step toward the realization of long-term stable MEMS clocks."],"dc:format":["application/pdf"],"dc:identifier":["https://hdl.handle.net/2142/129591"],"dc:language":["en","eng"],"dc:rights":["Copyright 2025 Jie Yan"],"dc:subject":["MEMS resonator","Frequency tracking","Feed-through"],"dc:title":["Feedthrough-immune frequency tracking of electrostatic MEMS resonators"],"dc:type":["text","Thesis"],"thesis:degree_discipline":["Electrical & Computer Engr"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["M.S."],"thesis:institution_name":["University of Illinois Urbana-Champaign"]},"updated_at":"2026-07-22T22:25:05Z"}