Design and fabrication of grating couplers

A silicon neural probe enables the monitoring of chemical dynamics with high spatial and temporal resolution and good chemical sensitivity and selectivity while causing less tissue damage than conventional micro-dialysis probes. Neural activity can be optically stimulated using optogenetics, which can be enabled using an off-chip light source and an optical grating coupler. In this thesis, we discuss the design and fabrication of waveguides and grating couplers, which can be used as a foundation for light delivery systems for various biological applications. Chapter 2 provides some background knowledge on waveguides and grating couplers, the design of which is described in Chapter 3. Chapter 4 covers the fabrication process, and Chapter 5 contains some concluding remarks and possible next steps.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Electrical & Computer Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2022

Author dc:creator

• Jha, Prasoon

Contributors dc:contributor

• Vlasov, Yurii A

• Engineering

Statement dc:rights

• Copyright 2021 Prasoon Jha

Language dc:language

en, eng

Handle dc:identifier

http://hdl.handle.net/2142/113903

OAI record oai:identifier

https://www.ideals.illinois.edu/oai-pmh?verb=GetRecord&metadataPrefix=etdms&identifier=oai%3Awww.ideals.illinois.edu%3A2142%2F113903