{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/113903"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/113903","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Design and fabrication of grating couplers","abstract":"Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2022-04-06 without embargo terms","abstract_html":"Submission original under an indefinite embargo labeled 'Open Access'. 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The submission was exported from vireo on 2022-04-06 without embargo terms","The student, Prasoon Jha, accepted the attached license on 2021-12-02 at 11:10.","The student, Prasoon Jha, submitted this Thesis for approval on 2021-12-02 at 11:16.","This Thesis was approved for publication on 2021-12-06 at 10:26.","DSpace SAF Submission Ingestion Package generated from Vireo submission #17358 on 2022-04-06 at 17:10:47","Made available in DSpace on 2022-04-29T21:34:49Z (GMT). No. of bitstreams: 2 JHA-THESIS-2021.pdf: 1904732 bytes, checksum: 5c23535c171d215a8ff27f15bf4b0342 (MD5) LICENSE.txt: 4208 bytes, checksum: 9a766dc96b21711c7b36b2927b54fcf1 (MD5) Previous issue date: 2021-12-06","A silicon neural probe enables the monitoring of chemical dynamics with high spatial and temporal resolution and good chemical sensitivity and selectivity while causing less tissue damage than conventional micro-dialysis probes. Neural activity can be optically stimulated using optogenetics, which can be enabled using an off-chip light source and an optical grating coupler. In this thesis, we discuss the design and fabrication of waveguides and grating couplers, which can be used as a foundation for light delivery systems for various biological applications. Chapter 2 provides some background knowledge on waveguides and grating couplers, the design of which is described in Chapter 3. Chapter 4 covers the fabrication process, and Chapter 5 contains some concluding remarks and possible next steps."]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Design and fabrication of grating couplers"]}]}],"canonical_facts":{"dc:contributor":["Vlasov, Yurii A"],"dc:creator":["Jha, Prasoon"],"dc:date":["2022-04-29T21:34:49Z","2021-12","2021-12-06"],"dc:description":["Submission original under an indefinite embargo labeled 'Open Access'. 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