Development of standard components for multi-degrees-of-freedom mems positioning stages with closed-loop feedback

Devices at the micro and nano scale are playing a significant role in a variety of fields such as electronics, micro-fluidics, bio-medical applications, and MEMS in micro-electro-mechanical systems. These miniaturized devices have advantages such as higher efficiency, less power consumption, and higher sensitivity than their macro counterparts. Especially, silicon-based multi-degree-of-freedom (DOF) MEMS positioning stages are critical to modern micro- and nano-manipulation and manufacturing technologies. Due to their ability to regulate displacement and forces with high dynamic range along with high resolution and accuracy, they play an important role to improve performance in micro-machining, micro-assembly, and micro-alignment processes. This research presents the design, analysis, simulation, fabrication, characterization, and control of multi-degree-of-freedom (DOF) closed-loop micro-positioning stages. The micro-positioning platforms were developed by the implementation of parallel kinematic mechanisms and transducers at the micro-scale and increased structural stiffness and natural frequency of the system in a favorable way. They were fabricated on SOI and double-sided SOI wafers with standard photolithography patterning processes followed by a series of dry and wet etching process steps to release the devices. The positioning loop of the fabricated device is closed using a commercially-off-the-shelf (COTS) capacitance-to-voltage conversion IC and characterized by a PID controller built into a dSPACE control platform. The performance of integrated processing elements were demonstrated by static and dynamic experiments including surface tensiometer application.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2021

Author dc:creator

• Koo, Bonjin

Contributors dc:contributor

• Ferreira, Placid
• Salapaka , Srinivasa
• Kapoor , Shiv
• Kesavadas , Thenkurussi
• Mensing , Glennys

• MEMS, Positioning stages, Parallel kinematics

Statement dc:rights

• Copyright 2020 Bonjin Koo

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/109498

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/109498