{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/109498"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/109498","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Development of standard components for multi-degrees-of-freedom mems positioning stages with closed-loop feedback","abstract":"Devices at the micro and nano scale are playing a significant role in a variety of fields such as electronics, micro-fluidics, bio-medical applications, and MEMS in micro-electro-mechanical systems. These miniaturized devices have advantages such as higher efficiency, less power consumption, and higher sensitivity than their macro counterparts. Especially, silicon-based multi-degree-of-freedom (DOF) MEMS positioning stages are critical to modern micro- and nano-manipulation and manufacturing technologies. Due to their ability to regulate displacement and forces with high dynamic range along with high resolution and accuracy, they play an important role to improve performance in micro-machining, micro-assembly, and micro-alignment processes. This research presents the design, analysis, simulation, fabrication, characterization, and control of multi-degree-of-freedom (DOF) closed-loop micro-positioning stages. The micro-positioning platforms were developed by the implementation of parallel kinematic mechanisms and transducers at the micro-scale and increased structural stiffness and natural frequency of the system in a favorable way. They were fabricated on SOI and double-sided SOI wafers with standard photolithography patterning processes followed by a series of dry and wet etching process steps to release the devices. The positioning loop of the fabricated device is closed using a commercially-off-the-shelf (COTS) capacitance-to-voltage conversion IC and characterized by a PID controller built into a dSPACE control platform. The performance of integrated processing elements were demonstrated by static and dynamic experiments including surface tensiometer application.","abstract_html":"Devices at the micro and nano scale are playing a significant role in a variety of fields such as electronics, micro-fluidics, bio-medical applications, and MEMS in micro-electro-mechanical systems. These miniaturized devices have advantages such as higher efficiency, less power consumption, and higher sensitivity than their macro counterparts. Especially, silicon-based multi-degree-of-freedom (DOF) MEMS positioning stages are critical to modern micro- and nano-manipulation and manufacturing technologies. Due to their ability to regulate displacement and forces with high dynamic range along with high resolution and accuracy, they play an important role to improve performance in micro-machining, micro-assembly, and micro-alignment processes. This research presents the design, analysis, simulation, fabrication, characterization, and control of multi-degree-of-freedom (DOF) closed-loop micro-positioning stages. The micro-positioning platforms were developed by the implementation of parallel kinematic mechanisms and transducers at the micro-scale and increased structural stiffness and natural frequency of the system in a favorable way. They were fabricated on SOI and double-sided SOI wafers with standard photolithography patterning processes followed by a series of dry and wet etching process steps to release the devices. The positioning loop of the fabricated device is closed using a commercially-off-the-shelf (COTS) capacitance-to-voltage conversion IC and characterized by a PID controller built into a dSPACE control platform. The performance of integrated processing elements were demonstrated by static and dynamic experiments including surface tensiometer application.","abstract_has_math":false,"creators":["Koo, Bonjin"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["Ferreira, Placid","Salapaka , Srinivasa","Kapoor , Shiv","Kesavadas , Thenkurussi","Mensing , Glennys"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2021,"date_issued":"2021-03-05T21:40:45Z","date_published":"2021-03-05T21:40:45Z","updated_at":"2026-07-22T22:24:50Z","subjects":["MEMS, Positioning stages, Parallel kinematics"],"languages":["en"],"rights":["Copyright 2020 Bonjin Koo"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/109498","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Ferreira, Placid","Salapaka , Srinivasa","Kapoor , Shiv","Kesavadas , Thenkurussi","Mensing , Glennys"]},{"key":"dc:creator","label":"Author","values":["Koo, Bonjin"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2021-03-05T21:40:45Z","2023-03-05T21:43:00Z","2020-11-23","2020-12"]},{"key":"dc:type","label":"Dc Type","values":["text","Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Mechanical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["MEMS, Positioning stages, Parallel kinematics"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2020 Bonjin Koo"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/109498"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Devices at the micro and nano scale are playing a significant role in a variety of fields such as electronics, micro-fluidics, bio-medical applications, and MEMS in micro-electro-mechanical systems. These miniaturized devices have advantages such as higher efficiency, less power consumption, and higher sensitivity than their macro counterparts. Especially, silicon-based multi-degree-of-freedom (DOF) MEMS positioning stages are critical to modern micro- and nano-manipulation and manufacturing technologies. Due to their ability to regulate displacement and forces with high dynamic range along with high resolution and accuracy, they play an important role to improve performance in micro-machining, micro-assembly, and micro-alignment processes. This research presents the design, analysis, simulation, fabrication, characterization, and control of multi-degree-of-freedom (DOF) closed-loop micro-positioning stages. The micro-positioning platforms were developed by the implementation of parallel kinematic mechanisms and transducers at the micro-scale and increased structural stiffness and natural frequency of the system in a favorable way. They were fabricated on SOI and double-sided SOI wafers with standard photolithography patterning processes followed by a series of dry and wet etching process steps to release the devices. The positioning loop of the fabricated device is closed using a commercially-off-the-shelf (COTS) capacitance-to-voltage conversion IC and characterized by a PID controller built into a dSPACE control platform. The performance of integrated processing elements were demonstrated by static and dynamic experiments including surface tensiometer application.","Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2022-12-01","The student, Bonjin Koo, accepted the attached license on 2020-11-19 at 14:05.","The student, Bonjin Koo, submitted this Dissertation for approval on 2020-11-19 at 14:45.","This Dissertation was approved for publication on 2020-11-23 at 16:29.","DSpace SAF Submission Ingestion Package generated from Vireo submission #15915 on 2021-03-04 at 16:19:40","Made available in DSpace on 2021-03-05T21:40:45Z (GMT). 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These miniaturized devices have advantages such as higher efficiency, less power consumption, and higher sensitivity than their macro counterparts. Especially, silicon-based multi-degree-of-freedom (DOF) MEMS positioning stages are critical to modern micro- and nano-manipulation and manufacturing technologies. Due to their ability to regulate displacement and forces with high dynamic range along with high resolution and accuracy, they play an important role to improve performance in micro-machining, micro-assembly, and micro-alignment processes. This research presents the design, analysis, simulation, fabrication, characterization, and control of multi-degree-of-freedom (DOF) closed-loop micro-positioning stages. The micro-positioning platforms were developed by the implementation of parallel kinematic mechanisms and transducers at the micro-scale and increased structural stiffness and natural frequency of the system in a favorable way. They were fabricated on SOI and double-sided SOI wafers with standard photolithography patterning processes followed by a series of dry and wet etching process steps to release the devices. The positioning loop of the fabricated device is closed using a commercially-off-the-shelf (COTS) capacitance-to-voltage conversion IC and characterized by a PID controller built into a dSPACE control platform. The performance of integrated processing elements were demonstrated by static and dynamic experiments including surface tensiometer application.","Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2022-12-01","The student, Bonjin Koo, accepted the attached license on 2020-11-19 at 14:05.","The student, Bonjin Koo, submitted this Dissertation for approval on 2020-11-19 at 14:45.","This Dissertation was approved for publication on 2020-11-23 at 16:29.","DSpace SAF Submission Ingestion Package generated from Vireo submission #15915 on 2021-03-04 at 16:19:40","Made available in DSpace on 2021-03-05T21:40:45Z (GMT). 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