Further analysis of solid state superionic stamping for nanoscale fabrication

The nanopattern print and etch process has played a significant role in the development of the modern technology. Our group has already developed the electrochemical nano-imprint process called solid state superionic stamping (S4) using AgIAgPO& glass as the solid electrolyte to pattern and transfer nanostructures on the silver. This technology is economically low-cost, high efficiency, and environmentally friendly. The whole process will not generate liquid waste or particles. In this thesis, we will review the process of how to make AgIAgPO& glass. Then, the method of how to scale up the S4 stamp from 5mm to 1-inch in diameter based on the previous study will be introduced. Also, the design process of the plate-to-roll system for high-volume manufacturing will be analyzed. Finally, to ensure the quality of the nanostructure and the lifetime of the stamp use, the effects of the rolling parameters including rolling speed, etching force, and patterning current or voltage will be studied.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2019

Author dc:creator

• Qian, Boqiang

Contributors dc:contributor

• Ferreira, Placid M

• S4
• nano-imprint

Statement dc:rights

• Copyright 2019 Boqiang Qian

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/105711

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/105711