Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 6 of 6 for “"nano-imprint"”.
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Hydrogen silsesquioxane (HSQ) for use in nano imprint lithography
… Extreme Ultra-Violet Lithography (EUV), and Nano-imprint lithography (NIL) are currently being studied to deliver a high throughput, low-cost process, and high field size for nano-lithography. EBL is a technique which can generate very small features (sub-10nm) but is a serial process which …
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Further analysis of solid state superionic stamping for nanoscale fabrication
The nanopattern print and etch process has played a significant role in the development of the modern technology. Our group has already developed the electrochemical nano-imprint process called solid state superionic stamping (S4) using AgIAgPO& glass as the solid electrolyte to pattern and …
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Membrane technology for the fabrication of three-dimensional photonic crystals
… photonic circuits on a single substrate. Nanofabrication techniques currently limit the ability to create the multilayer structure of dielectric materials. Past investigators have approached the problem using the layer-by-layer fabrication method; this method leverages the planar processes …
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Design, fabrication and characterization of resonant waveguide grating based optical biosensors
… detection limit down to single molecule. Optical nanostructures, specifically the resonant waveguide grating (RWG) and nano-ribbon cavity based biodetection are promising in this context. The main element of this dissertation is design, fabrication and characterization of RWG sensors for different …
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Solid state superionic stamping design for large area patterning
… These compounds opened the possibility of a nano-imprint inspired stamp generation process that would scale to significantly larger areas while producing higher quality stamp surfaces. The silver iodide silver metaphosphate glass system was singled out as most promising for S4 stamps. This …
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Evanescent field enhanced fluorescence on a photonic crystal surface
… that include replica molding on plastic and nano-imprint lithography on quartz substrates result in devices that are practical for single-use disposable applications. In this dissertation I will address design, fabrication and characterization of PCs that employ the guided mode resonance …