Analysis and determination of chemical mechanical planarization mechanisms for tungsten and copper

Mitchell, Evelynn J. R.

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Analysis and determination of chemical mechanical planarization mechanisms for tungsten and copper

dc:creator Mitchell, Evelynn J. R.

dc:date.issued2000

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Author dc:creator: Mitchell, Evelynn J. R.

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Identifier: Mitchell, E. J. R. (2000). Analysis and determination of chemical mechanical planarization mechanisms for tungsten and copper [Master's thesis, Southwest Texas State University].
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Mitchell, Evelynn J. R.. Analysis and determination of chemical mechanical planarization mechanisms for tungsten and copper. 2000. https://hdl.handle.net/10877/15364

Analysis and determination of chemical mechanical planarization mechanisms for tungsten and copper

Abstract

Author and committee

Subjects

Rights

Identifiers

Chain of custody

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