Back to results

Rochester Institute of Technology

Alternative Lithographic Methods for Variable Aspect Ratio Vias

dc:creator Schepis, Anthony R

thesis:degree_name Microelectronic Engineering (MS)

Degree

thesis:*

Name thesis:degree_name: Microelectronic Engineering (MS)
Level thesis:degree_level: Thesis

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Schepis, Anthony R
Contributors dc:contributor: Bruce W. Smith

Subjects

dc:subject × 6

Identifiers

dc:identifier.*

Repository record dc:identifier: https://repository.rit.edu/theses/8341
OAI identifier oai:identifier: oai:repository.rit.edu:theses-9377

Chain of custody

source

Harvested from: Rochester Institute of Technology
Base URL: repository.rit.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

citation

Schepis, Anthony R. Alternative Lithographic Methods for Variable Aspect Ratio Vias. Thesis thesis, https://repository.rit.edu/theses/8341

More from Rochester Institute of Technology