{"id":{"repo_id":"rit","oai_identifier":"oai:repository.rit.edu:theses-9377"},"canonical_url":"https://search.dev.ndltd.org/etd/rit/oai:repository.rit.edu:theses-9377","repository":{"repo_id":"rit","name":"Rochester Institute of Technology","base_url":"https://repository.rit.edu/do/oai/"},"display":{"title":"Alternative Lithographic Methods for Variable Aspect Ratio Vias","abstract":"","abstract_html":null,"abstract_has_math":false,"creators":["Schepis, Anthony R"],"institution":null,"degree_name":"Microelectronic Engineering (MS)","degree_level":"Thesis","degree_discipline":null,"degree_department":null,"school":null,"contributors":["Bruce W. Smith"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":null,"date_issued":"","date_published":null,"updated_at":"2026-07-27T20:45:34Z","subjects":["Aspect ratio","Contact","Directed self assembly","Lithography","Optical vortex","Via"],"languages":[],"rights":[],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://repository.rit.edu/theses/8341","outbound_label":"Repository record","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Bruce W. Smith"]},{"key":"dc:creator","label":"Author","values":["Schepis, Anthony R"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Microelectronic Engineering (MS)"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Aspect ratio","Contact","Directed self assembly","Lithography","Optical vortex","Via"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://repository.rit.edu/theses/8341"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:title","label":"Title","values":["Alternative Lithographic Methods for Variable Aspect Ratio Vias"]}]}],"canonical_facts":{"dc:contributor":["Bruce W. Smith"],"dc:creator":["Schepis, Anthony R"],"dc:identifier":["https://repository.rit.edu/theses/8341"],"dc:subject":["Aspect ratio","Contact","Directed self assembly","Lithography","Optical vortex","Via"],"dc:title":["Alternative Lithographic Methods for Variable Aspect Ratio Vias"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["Microelectronic Engineering (MS)"]},"updated_at":"2026-07-27T20:45:34Z"}