Nonplanar Nanofabrication via Interface Engineering

This thesis develops a platform for scalable fabrication of suspended, ultrathin nanostructures as building blocks of nanoelectromechanical systems by extending conventional planar techniques to nonplanar designs. We achieve this by engineering interface forces through a patterned molecular monolayer to enable controlled delamination of a deposited thin-film in predetermined locations. This allows us to form nonplanar structures with thicknesses < 10 nm and nanogaps reaching < 10 nm – features traditionally challenging to achieve. Our approach, which builds on standard, wafer-scale, and conventionally-compatible techniques, is versatile, tunable, and compatible with diverse materials. As a result, the technique opens up new opportunities for applications such as miniaturized nanoelectromechanical devices, including ultrathin mechanical resonators, which are demonstrated in this work.

Name thesis:degree_name

Master

Department dc:contributor.department

Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2023

Author dc:creator

• Spector, Sarah O.

Advisor dc:contributor.advisor

• Niroui, Farnaz

Statement dc:rights

• In Copyright - Educational Use Permitted
• Copyright MIT

Licence dc:rights.uri

• http://rightsstatements.org/page/InC-EDU/1.0/

Handle dc:identifier.uri

https://hdl.handle.net/1721.1/150066

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/150066