{"id":{"repo_id":"mit","oai_identifier":"oai:dspace.mit.edu:1721.1/150066"},"canonical_url":"https://search.dev.ndltd.org/etd/mit/oai:dspace.mit.edu:1721.1/150066","repository":{"repo_id":"mit","name":"MIT","base_url":"https://dspace.mit.edu/oai/request"},"display":{"title":"Nonplanar Nanofabrication via Interface Engineering","abstract":"This thesis develops a platform for scalable fabrication of suspended, ultrathin nanostructures as building blocks of nanoelectromechanical systems by extending conventional planar techniques to nonplanar designs. We achieve this by engineering interface forces through a patterned molecular monolayer to enable controlled delamination of a deposited thin-film in predetermined locations. This allows us to form nonplanar structures with thicknesses < 10 nm and nanogaps reaching < 10 nm – features traditionally challenging to achieve. Our approach, which builds on standard, wafer-scale, and conventionally-compatible techniques, is versatile, tunable, and compatible with diverse materials. As a result, the technique opens up new opportunities for applications such as miniaturized nanoelectromechanical devices, including ultrathin mechanical resonators, which are demonstrated in this work.","abstract_html":"This thesis develops a platform for scalable fabrication of suspended, ultrathin nanostructures as building blocks of nanoelectromechanical systems by extending conventional planar techniques to nonplanar designs. We achieve this by engineering interface forces through a patterned molecular monolayer to enable controlled delamination of a deposited thin-film in predetermined locations. This allows us to form nonplanar structures with thicknesses &lt; 10 nm and nanogaps reaching &lt; 10 nm – features traditionally challenging to achieve. Our approach, which builds on standard, wafer-scale, and conventionally-compatible techniques, is versatile, tunable, and compatible with diverse materials. As a result, the technique opens up new opportunities for applications such as miniaturized nanoelectromechanical devices, including ultrathin mechanical resonators, which are demonstrated in this work.","abstract_has_math":false,"creators":["Spector, Sarah O."],"institution":"Massachusetts Institute of Technology","degree_name":"Master","degree_level":null,"degree_discipline":null,"degree_department":"Massachusetts Institute of Technology. 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We achieve this by engineering interface forces through a patterned molecular monolayer to enable controlled delamination of a deposited thin-film in predetermined locations. This allows us to form nonplanar structures with thicknesses < 10 nm and nanogaps reaching < 10 nm – features traditionally challenging to achieve. Our approach, which builds on standard, wafer-scale, and conventionally-compatible techniques, is versatile, tunable, and compatible with diverse materials. 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