Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning

This thesis introduces two ortho-planar MEMS devices that can be used to position microcomponents: the XZ Micropositioning Mechanism and the XYZ Micromanipulator. The displacement and force relationships are presented. The devices were fabricated using surface micromachining processes and the resulting mechanisms were tested. A compliant XYZ Micromanipulator was also designed to reduce backlash and binding. In addition, several other MEMS positioners were fabricated and tested: the Micropositioning Platform Mechanism (MPM), the Ortho-planar Twisting Micromechanism (OTM), and the Ortho-planar Spring Micromechanism (OSM).

Name thesis:degree_name

MS

Grantor dc:publisher

Brigham Young University - Provo

Author dc:creator

• Jensen, Kimberly A.

• MEMS
• microelectromechanical systems
• micropositioning
• compliant mechanisms
• out-of-plane
• ortho-planar
• surface micromachining
• thermal actuation
• thermomechanical in-plane microactuator
• TIM
• Mechanical Engineering

Language dc:language

English

Repository record dc:identifier

https://scholarsarchive.byu.edu/etd/230

OAI identifier oai:identifier

oai:scholarsarchive.byu.edu:etd-1229