Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 15 of 15 for “"microactuator"”.
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A large strain piezoelectric microactuator by folding assembly
In-plane amplification of thin film piezoelectric strain has been previously demonstrated using mechanical flexures fabricated at the micro scale. This new work presents a method by which that amplification can be increased, along with a method to reduce parasitic out of plane bending present in …
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Electrothermomechanical Modeling of a Surface-micromachined Linear Displacement Microactuator
… of an electrically-heated polycrystallinesilicon microactuator are explored. Using finite-difference techniques, an electrothermal model based on the balance of heat dissipation and heat losses is developed. For accurate simulation, the relevant temperature dependent properties from the …
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Laterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications
… Effect Transistor (LMGFET) invented at LSU as a microactuator is the subject of study in this research. The gate moving in lateral direction in a LMGFET changes channel width but keeps the channel length and the gap between the metal gate and the gate oxide constant. LMGFET offers linear change …
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Modeling and Simulation of MEMS Devices
… modeling and simulation tools for impact microactuators. Nonsmooth dynamics due to impacts and friction are studied, combining various approaches, including direct numerical integration, root-finding technique for periodic motions, continuation of grazing periodic orbits, and local …
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Thermal Microactuators for Microelectromechanical Systems (MEMS)
<p>Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in …
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Microscale actuators from carbon nanotube and hydrogel composites
This thesis develops and tests a novel microactuator system using carbon nanotubes (CNT) and poly(N-isopropylacrylamide) (PNIPAM) hydrogel, which have been combined to make a microactuator system with a wide range of possible designs without needing to modify the fabrication approach. These …
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Fault detection and diagnosis : application in microelectromechanical systems
… systems; an electrostatic parallel-plate microactuator and a torsionally resonant atomic force microscope. From an engineering point of view, failure modes appeared in the microcomponents of the microactuator and the TR-AFM are encountered as parameter variations and are captured, isolated …
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Design of Piezoresistive MEMS Force and Displacement Sensors
… design showed promise of future application in microactuator characterization. Similarly, the CLOO-FADS exhibited possible feedback control capability, but was limited by control circuit complexity and implementation challenges. The piezoresistive behavior exhibited by the Thermomechanical …
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EXTREME VERTICAL DISPLACEMENT, HIGH FORCE, SILICON MICROSTAGE ZIPPER ACTUATORS
Large vertical deflection, high force microactuators are desired in MEMS for a variety of applications. This thesis details a novel large-displacement electrostatic "zipper" microactuator capable of achieving hundreds of microns of out-of-plane deflection and delivering high forces, fabricated …
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Fully Compliant Tensural Bistable Mechanisms (FTBM) with On-Chip Thermal Actuation
… with the result-ing Thermomechanical In-plane Microactuators (TIMs) and Amplified Thermomechanical In-plane Microactuators (ATIMs). Successful on-chip actuation was demonstrated. The bistable mechanisms and actuators in this work were fabricated in the MUMPs and SUMMiT V surface micromachining …
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A low-leakage 3-way silicon microvalve
… combines an integrated low voltage electrostatic microactuator as well as tight sealing capability. The device uses only silicon and silicon dioxide, which allows it to be used in a gas chromatography system for a wide range of chemically compatible gases. Using a 3-way design, the valve can …
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Reduced-Order Modeling and Design Optimization of Thermomechanical Shape Memory Alloy-Based Bistable Microactuators and Hyperelastic Material Systems
… for designing advanced materials and bistable microactuators. The work begins with a stabilized finite element formulation that addresses common numerical issues such as volumetric locking, shear locking, and hourglassing. This is achieved using incompatible displacement modes within a …
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Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators
… of interest, the thermomechanical in-plane microactuator (TIM). Recent work has shown the possibility of a novel approach of sensing mechanical outputs of the TIM without ancillary sensors. This sensing approach exploits the piezoresistive property of silicon. However, to implement this …
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Modeling and Control of Surface Micromachined Thermal Actuators
… transient and steady-state response of thermal microactuators is desirable to provide guidance for design and operation. However, modeling the full response of thermal actuators is challenging due to the temperature-dependent material properties and nonlinear deformations that must be included …
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Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning
This thesis introduces two ortho-planar MEMS devices that can be used to position microcomponents: the XZ Micropositioning Mechanism and the XYZ Micromanipulator. The displacement and force relationships are presented. The devices were fabricated using surface micromachining processes and the …