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Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 10 of 10 for “"rapid thermal processing"”.
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Pattern effects in rapid thermal processing
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.
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Emissivity of patterned silicon wafers in rapid thermal processing
… of patterns on emissivity in silicon wafers in rapid thermal processing systems has been investigated. In this study, two experiments with layered and patterned silicon wafers were conducted. The main difference in the experiments is the way in which the temperature was controlled. The first …
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Rapid thermal processing of silicon solar cells-passivation and diffusion
Diese Doktorarbeit konzentriert sich auf der Entwicklung eines optimierten Solarzellen-prozesses für Czochralski(Cz) Siliciummaterialien, auf die Charakterisierung der Oberflächenpassiveierung und auf die Diffusion mittels eines raschen thermischen Prozess (RTP). <br>Bordotierte …
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Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films
… electrical and optical study on the effect of rapid thermal processing on strained Si1i?-xGex, Si1i?-xi?-yGexCy alloys was reported in this thesis. Structural characterization showed that, when annealed at temperature higher than 900i??C, substitutional C changed to more stable phase of SiC, …
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Reactive DC magnetron sputtering of ultrathin superconducting niobium nitride films
… were heated during the deposition, by ex situ rapid thermal processing, and in some cases by the addition of an RF bias to the substrate holder during the sputter deposition. These improvements to the deposition of NbN have enabled the production of superconducting nanowire single photon …
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Laser and electron beam treatments for corrosion protection of friction stir welds in aerospace alloys
… which created a homogeneous surface through rapid surface melting and solidification. The rapid thermal processing dissolved and dispersed the precipitate solute atoms which were retained in solid solution through planar solidification. Electron beams and various lasers were used in the HPBSM …
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patial Control of the Conductivity of Poly(3,4-ethylenedioxythiopehe): Poly(styrenesulfonate) Thin Films
… thin films have undergone treatment from rapid thermal processing and direct ultraviolet irradiation at a wavelength of 254 nm. Through various characterization methods, the underlying physical changes as a result of rapid thermal annealing indicate a shift of morphology that correlates to …
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Preparation And Characterization Of Cigss Solar Cells And Pv Module Data Analysis
… of these precursors was carried out using rapid thermal processing (RTP). CIGS films were sulfurized using chemical bath deposition (CBD). ZnO:Al was deposited on the CIGSS films using RF sputtering. A separate LABVIEW program was written to automate the process of ZnO:Al deposition. Ni/Al …
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Solid-State Impact-Ionization Multiplier
… wet etching, metal deposition, annealing, and rapid thermal processing. Testing was performed by connecting the device to a silicon photodiode, indium-gallium-arsenide photodiodes, and a function generator to demonstrate its compatibility with arbitrary current sources. Current gains above 100 …