Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 37 for “"Semiconductor processing"”.
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Dynamic Time Warping Constraints for Semiconductor Processing
Semiconductor manufacturing processes have become increasingly complex with the continued growth of chip manufacturing. Monitoring these processes for anomalies is crucial for maintaining quality and yield. However, a notable challenge for monitoring time series signals are the nonlinear variations …
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Program management systems for the semiconductor processing capital equipment supply chain
… is responsible for developing and procuring the semiconductor processing capital equipment that is used throughout all of the company's development and manufacturing facilities. The semiconductor industry is faced with rapid technology change, increase in the complexity of the manufacturing …
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Heat transfer in silicon - experiments and simulation
… the heat transfer in silicon. Silicon is the key semiconductor material, and thermal processing is the traditional method that is used in semiconductor processing. In this research, we can predict the temperature of the silicon wafer during heating. This ability to predict wafer temperature during …
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Active Antenna Bandwidth Control Using Reconfigurable Antenna Elements
… of a time varying system. Advances in microwave semiconductor processing technologies have enabled the use of compact, ultra-high quality RF and microwave switches in novel aspects of antenna design. This dissertation introduces the concept of reconfigurable antenna bandwidth control and how …
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Development of an Advanced Semiconductor Laboratory
… scientists and engineers to work in the vast semiconductor industry, especially in the emerging technologies of microelectronics, optoelectronics, and nanotechnology. For this reason, the development of an undergraduate microelectronics minor as well as a more rigorous graduate curriculum has …
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Development of Gallium Nitride-Based Power Electronic Devices Using Plasma-Assisted Molecular Beam Epitaxy
… devices. The hands-on research on GaN compound semiconductors includes thin film growth, material characterization, device fabrication, and device characterization using state-of-the-art semiconductor processing equipment and characterizing tools. High-quality GaN films grown by plasma-assisted …
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Techniques for Efficient Wide-Range Radio-Frequency Power Generation System
… power applications, e.g. plasma generation for semiconductor processing, are often characterized by the delivery of rf power, at a specific frequency or within a narrow band, with high peak power levels and wide overall power ranges, into loads with varying impedances. To meet the evolving …
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Axiomatic development of a machine control system
… Design framework. The machine is a type of semiconductor processing equipment, which requires numerous actuators and sensors and the intelligent control of them to planarize thin layers of wafers. Signal processing modules, control algorithms, sequential process steps, graphical user …
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Plasma Diagnostics of Discharges in Nitrogen-Trifluoride (Etching, Semiconductor)
… techniques applicable to all plasmas used for semiconductor processing. By monitoring the change of the mass spectrum ion signals when the discharge was initiated, it was found that the discharge is much more effective at dissociating NF(,3) than CF(,4) and that the percentage dissociation of …
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Chip scale monolithic integration of inductive and capacitive components by self-rolled-up membrane nanotechnology
… elements are fabricated in-plane using standard semiconductor processing techniques, and subsequently triggered by the built-in stress to self-assemble and roll into cylindrical air-core architectures. By designing the planar structure geometry and constituent layer properties to achieve a …
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Metal-assisted chemical etching of III-V semiconductors for advanced optoelectronic device fabrication
… nanometer level. Top-down fabrication modules in semiconductor processing including etching have been extensively explored and implemented for a wide variety of device structures. One of the most novel techniques for etching semiconductors is metal-assisted chemical etching (MacEtch), a …
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Hydrothermal synthesis of zinc oxide nanowire arrays for photovoltaic applications
… scalable process that is compatible with many semiconductor processing techniques. However, precise control over nanowire array dimensions such as nanowire spacing, diameter, length, and alignment, which is important for optoelectronic device applications, has proven elusive due to lack of …
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Substrate cleaning using a remote hydrogen rf-plasma
The substrates (wafers) used in semiconductor processing have a surface oxide layer (the so-called native oxide layer) and a hydrocarbon contamination layer that must be removed before growing an epitaxial film of good quality. In this work, low temperature remote rf-hydrogen plasma cleaning of …
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Commercialization potential of dye-sensitized mesoscopic solar cells
… of dye sensitizer molecules is anchored onto a semiconductor mesoporous film such as TiO₂ to generate charges on exposure to illumination. The nanocrystalline particulate threedimensional network provides high surface area coverage for the photogeneration process and percolation of charges. In …
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Modeling of advanced integrated circuit planarization processes : electrochemical-mechanical planarization (eCMP), STI CMP using non-conventional slurries
… dimensions, and employing novel structures, semiconductor processing must also advance to effectively and eciently process these devices. Arguably one of the most critical, inefficient, poorly understood and costly processes is planarization. Thus, this thesis focuses on two types of …
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The road to high performance single walled carbon nanotube thin film transistors: purification, densification, and integration
… wafer scale integration with existing commercial semiconductor processing methods. However, major crucial roadblocks continue to hinder the incorporation of SWNTs in commercial electronics. First, co-existence of metallic and semiconducting SWNTs results in thin film transistors with unacceptably …
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Design, implementation, and evaluation of high-efficiency high-power radio-frequency inductors
… spaces such as communications, RF food processing, heating, and plasma generation for semiconductor processing. Inductors for high frequency and high power (e.g., tens of MHz and hundreds of watts and above) have traditionally been implemented as air-core solenoids to avoid …
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Polymers for Next Generation Lithography
… with smaller and smaller arrays. Since then, the semiconductor industry has relied on electron beam lithography for sub-micron patterning of integrated circuits. Materials with unique properties are required to meet the needs of the lithography industry. Scientists are modifying the properties of …
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ERNI-3D : a technology-generic tool for interconnect reliability projections in 3D integrated circuits
Recent developments in semiconductor processing technology has enabled the fabrication of a single integrated circuit (IC) with multiple device-interconnect layers or wafers stacked on each other. This approach is commonly referred to as the 3D integration of ICs. Although there has been …
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