Axiomatic development of a machine control system

Axiomatic Design is presented as a scientific methodology in designing a complex machine control system. As an example, the CMP a machine control system is developed using the Axiomatic Design framework. The machine is a type of semiconductor processing equipment, which requires numerous actuators and sensors and the intelligent control of them to planarize thin layers of wafers. Signal processing modules, control algorithms, sequential process steps, graphical user interface, process recipe editor and the overall control system structure are all designed by the Axiomatic decomposition. Axiomatic Design is proved to be a very effective tool in control system development. It took less than six months to develop the system and the control system is fully functional without any major error or mistake. The resulting system is clear to understand, easy to maintain and upgrade, and flexible for further development and integration. Although the development has been specific to the CMP cc machine, the control system structure and the design methodologies presented in this thesis are universally applicable to the development of any type of machine control system.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Mechanical Engineering.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2000

Author dc:creator

• Lee, Kwangduk Douglas, 1970-

Advisor dc:contributor.advisor

• Nam P. Suh.

• Mechanical Engineering.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/8821

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/8821