Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 141 for “"CMP"”.
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The environmental impact of copper CMP
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 2000.
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Möglichkeiten eines DMO-Prozesses in der CMP-Refraktionsseismik
Die herk¨ommlichen Wellenfeldbearbeitungen der CMP-Refraktionsseismik basieren auf N¨aherungsl¨osungen f¨ur kleine Schichtneigungen. Dieser Ansatz hat sich f¨ur Schichtneigungswinkel bis zu ca. 100 bew¨ahrt. Mit gr¨oßer werdendem Neigungswinkel verschlechtern sich die Ergebnisse der …
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Copper Surface Chemistry Relevant to Chemical Mechanical Planarization (Cmp)
… (TAZ) on copper removal rate during CMP. Removal rates were higher for solutions containing TAZ than solutions containing BTA. The corrosion inhibitor films were characterized using AFM, cyclic voltammetry, impedance spectroscopy, surface-enhanced Raman spectroscopy, and mass …
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Metrology of SIMOX buried oxide and nitride/STI CMP
… Isolation (STI) Chemical Mechanical Polishing (CMP). CMP processes have been heralded as a way to planarize films and structures on wafers to a degree which has not been possible before. However, recent studies have shown that the uniformity of CMP processes depends on the layout-pattern …
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Ice and abrasive particles : an alternative CMP polishing technique
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
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Framework for characterization of copper interconnect in damascene CMP processes
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science; and, Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
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Kazuistika fyzioterapeutické péče o pacienta po ischemické CMP s pravostrannou hemiparézou
… fyzioterapeutické péče o pacienta po ischemické CMP s pravostrannou hemiparézou Cíl práce: Získání a zpracování teoretických poznatků o etiologii, klinických příznacích, stádiích a možných variantách onemocnění a následných terapeutických přístupech u cévní mozkové příhody. Dále prokázání …
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Exploiting Multigrain Parallelism in Pairwise Sequence Search on Emergent CMP Architectures
With the emerging hybrid multi-core and many-core compute platforms delivering unprecedented high performance within a single chip, and making rapid strides toward the commodity processor market, they are widely expected to replace the multi-core processors in the existing High-Performance …
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Slurry abrasive particle agglomeration experimentation and modeling for chemical mechanical planarization (CMP)
… instability in chemical-mechanical polishing (CMP) slurries. In CMP, the formation of large agglomerates is of great concern, as these large particles are associated with high defectivity and poor polishing performance. The proposed model describes the complex CMP slurry system as a colloid …
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A statistical metrology framework for characterizing ILD thickness variation in CMP processes
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
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Improving the Off-chip Bandwidth Utilization and Energy Efficiency in Chip Multiprocessor (CMP) Architectures
… and energy efficiency in chip multiprocessor (CMP) architectures. This work consists of two main parts. The first part investigates the early write-back technique for a two-level cache hierarchy in a CMP with four processor cores. Early write-back can be viewed as a modified cache write policy …
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Using statistical metrology to understand pattern-dependent ILD thickness variation in oxide CMP processes
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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Proteindesign zur Verbesserung des Nucleosidanaloga-Umsatzes in menschlichen Zellen: Desoxycytidin-Kinase und UMP/CMP-Kinase
… Desoxycytidin-Kinase (dCK) und die UMP/CMP-Kinase kloniert, überexprimiert und aufgereinigt. Da neben der Phosphorylierung durch Kinasen auch die Inaktivierung der Nucleosidanaloga durch Desaminasen eine wichtige Rolle spielt, wurden die menschliche Cytidin- und die …
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Phylogenetic distribution of CMP-Neu5Ac hydroxylase (CMAH), the enzyme synthetizing the pro-inflammatory human xeno-antigen Neu5Gc
The enzyme CMP-N-acetylneuraminic acid hydroxylase (CMAH) is responsible for thesynthesis of N-glycolylneuraminic acid (Neu5Gc), a sialic acid present on the cell surfaceproteins of most deuterostomes. The CMAH gene is thought to be present in mostdeuterostomes, but it has been inactivated in a …
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Modeling of advanced integrated circuit planarization processes : electrochemical-mechanical planarization (eCMP), STI CMP using non-conventional slurries
… copper planarization (eCMP) are developed, with a focus on electrochemical mechanisms and wafer-scale uniformity. Specifically, previous models for eCMP are enhanced to consider the full electrochemical system driving planarization in eCMP. We explore the notion of …
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Applying run-by-run process control to chemical-mechanical planarization and assessing insertion costs versus benefits of CMP
Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1995, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
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Characterization and modeling of polysilicon MEMS chemical-mechanical polishing
… circuits, chemical-mechanical polishing (CMP) is becoming an enabling technology for microelectromechanical systems (MEMS). To reliably use CMP in the manufacturing process, designers must be able to accurately predict the CMP process and control final surface uniformity. This thesis …
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The association between musculoskeletal pain and physical activity, falls and psychological concerns related to falls in community dwelling older adults
Background Chronic musculoskeletal pain (CMP) is a common pervasive issue among older adults and may affect mobility and falls risk. Aims Investigate the relationship between CMP and physical activity/ sedentary behaviour, psychological concerns related to falls and falls in community dwelling …
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Emergent quality issues in the supply of Chinese medicinal plants: A mixed methods investigation of their contemporary occurrence and historical persistence
… centuries ago in Chinese medicinal plants (CMP) were investigated to explore why they still persist in an era of advanced analytical testing and extensive legislation so that a solution to improve CMP quality could be proposed. This is important for 85% of the world’s population who rely on …
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Chip-scale modeling of pattern dependencies in copper chemical mechanical polishing processes
Chemical mechanical polishing (CMP) has become a necessary processing step in the fabrication of copper interconnects. Copper CMP is recognized to suffer from pattern dependent problems such as dishing and erosion, which cause increased line resistance and non-uniformity within the die. The …
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