Near-Optimal Control of Atomic Force Microscope For Non-contact Mode Applications

A compact model representing the dynamics between piezoelectric voltage inputs and cantilever probe positioning, including nonlinear surface interaction forces, for atomic force microscopes (AFM) is considered. By considering a relatively large cantilever stiffness, singular perturbation methods reduce complexity in the model and allows for faster responses to Van der Waals interaction forces experienced by the cantilever's tip and measurement sample. In this study, we outline a nonlinear near-optimal feedback control approach for non-contact mode imaging designed to move the cantilever tip laterally about a desired trajectory and maintain the tip vertically about the equilibrium point of the attraction and repulsion forces. We also consider the universal instance when the tip-sample interaction force is unknown, and we construct cascaded high-gain observers to estimate these forces and multiple AFM dynamics for the purpose of output feedback control. Our proposed output feedback controller is used to accomplish the outlined control objective with only the piezotube position available for state feedback.

Name thesis:degree_name

Master of Science

Level thesis:degree_level

masters

Discipline thesis:degree_discipline

Computer Engineering

Department dc:contributor.department

Electrical and Computer Engineering

Grantor dc:publisher

Virginia Tech

Year dc:date.issued

2022

Author dc:creator

• Sutton, Joshua Lee

Chair dc:contributor.committeechair

• Boker, Almuatazbellah M.

Committee members dc:contributor.committeemember

• Doan, Thinh Thanh
• Mili, Lamine M.

• atomic force microscope
• optimal control
• output feedback
• singular perturbation

Statement dc:rights

• In Copyright

Licence dc:rights.uri

• http://rightsstatements.org/vocab/InC/1.0/

Language dc:language.iso

en

Dc Identifier Other

vt_gsexam:35050

OAI identifier oai:identifier

oai:vtechworks.lib.vt.edu:10919/110770