Design and optimization of a macro-micro manipulator featuring a 3-UPS compliant parallel mechanism

Micromanipulation in microtechnology is highly needed for microfabrication and biomedical applications. Specifically, high manipulation resolution combined with accurate macromotions plays a more crucial role especially in the production of semi-conductors, assembly of integrated circuits as well as the accurate manipulation of cells and chromosomes. As a result, it is desired to design such a manipulator to be capable of achieving macro-micro manipulation with high accuracy and high reliability. This thesis proposes a novel macro-micro manipulator system composed of two different parallel mechanisms which are responsible for the macro motion and the micro manipulation respectively. The macromanipulator is a 3-RRR planar parallel mechanism which has the mobility of 3 DOFs, namely two translational DOFs along x- and y-axis and one rotational DOF around the z-axis while the micromanipulator is a 3-UPS compliant parallel mechanism with an orthogonal structure of 3 translational DOFs. The work in the thesis covers structural design of the macro-micro manipulator, kinematic modeling and inverse kinematic analysis, formulation of Jacobian matrix; micromanipulator-focused stiffness evaluation, workspace analysis and structural optimization of stiffness and workspace properties.

Name thesis:degree_name

Master of Applied Science (MASc)

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Ontario Institute of Technology

Year dc:date.issued

2016

Author dc:creator

• Liang, Benkai

Advisor dc:contributor.advisor

• Zhang, Dan

• Macro-micro manipulator
• Micromanipulation
• Compliant mechanism
• Optimization

Language dc:language.iso

en

Handle dc:identifier.uri

https://hdl.handle.net/10155/732

OAI identifier oai:identifier

oai:ontariotechu.scholaris.ca:10155/732