Back to results
University of Illinois - Urbana-Champaign
Langmuir Probe Investigations of Helicon Wave Discharges in Three-Dimensions of a Commercial-Scale Plasma Processing Reactor
Abstract
dc:descriptionMade available in DSpace on 2017-07-06T18:55:40Z (GMT). No. of bitstreams: 3 Norman_Jeffrey_E_MS.pdf: 131280649 bytes, checksum: 8855837adc5e4a5499477d831ae9054d (MD5) Norman_Jeffrey_E_MS_ABS.pdf: 587265 bytes, checksum: 169d41c371af9d5cccc4c7791a7b01b3 (MD5) license.txt: 4813 bytes, checksum: 715c4321821a960fa1a1e91d2ac7ebce (MD5) Previous issue date: 2002
Degree
thesis:*- Name thesis:degree_name
- M.S. (master's)
- Level thesis:degree_level
- Thesis
- Discipline thesis:degree_discipline
- Nuclear, Plasma, and Radiological Engineering
- Year dc:date
- 2017
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Norman, Jeffrey E.
Subjects
dc:subject × 9Rights
dc:rights- Statement dc:rights
-
- Copyright Jeffrey E. Norman 2002
- Language dc:language
- en
Identifiers
dc:identifier.*- Handle dc:identifier
- http://hdl.handle.net/2142/96475
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/96475