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University of Illinois - Urbana-Champaign

Langmuir Probe Investigations of Helicon Wave Discharges in Three-Dimensions of a Commercial-Scale Plasma Processing Reactor

Abstract

dc:description

Made available in DSpace on 2017-07-06T18:55:40Z (GMT). No. of bitstreams: 3 Norman_Jeffrey_E_MS.pdf: 131280649 bytes, checksum: 8855837adc5e4a5499477d831ae9054d (MD5) Norman_Jeffrey_E_MS_ABS.pdf: 587265 bytes, checksum: 169d41c371af9d5cccc4c7791a7b01b3 (MD5) license.txt: 4813 bytes, checksum: 715c4321821a960fa1a1e91d2ac7ebce (MD5) Previous issue date: 2002

Degree

thesis:*
Name thesis:degree_name
M.S. (master's)
Level thesis:degree_level
Thesis
Discipline thesis:degree_discipline
Nuclear, Plasma, and Radiological Engineering
Year dc:date
2017

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Norman, Jeffrey E.

Subjects

dc:subject × 9

Rights

dc:rights
Statement dc:rights
  • Copyright Jeffrey E. Norman 2002
Language dc:language
en

Identifiers

dc:identifier.*
Handle dc:identifier
http://hdl.handle.net/2142/96475
OAI identifier oai:identifier
oai:www.ideals.illinois.edu:2142/96475

Chain of custody

source
Harvested from
University of Illinois - Urbana-Champaign
Base URL
www.ideals.illinois.edu/oai-pmh
Last updated
2026-07-22
Source record
OAI-PMH GetRecord
citation

Norman, Jeffrey E.. Langmuir Probe Investigations of Helicon Wave Discharges in Three-Dimensions of a Commercial-Scale Plasma Processing Reactor. Thesis thesis, 2017. http://hdl.handle.net/2142/96475