A Novel Device for Energy Distribution Measurements in an RF Plasma Discharge

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Name thesis:degree_name

M.S. (master's)

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Nuclear, Plasma, and Radiological Engineering

Year dc:date

2017

Author dc:creator

• Nguyen, Phi L.

• nuclear engineering
• energy distribution measurements
• RF plasma discharge
• ion energy distribution
• RF capacitively coupled reactor
• langmuir probe
• capacitive probe
• E x B cubical energy analyzer

Statement dc:rights

• Copyright Martin John Neumann 2004

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/96471

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/96471