Plasma-Material Interactions: A Langmuir Probe Analysis of a Cylindrical SiO(2) Deposition System and a Computational Study Using VFTRIM3D

The $\rm SiO\sb2$ films deposited in this system are analyzed for their gas permeation qualities and are correlated to the plasma properties gathered using Langmuir probes as well as the gas, pressure, and time recipes used to produce them. It is found in this work that the application of $\rm SiO\sb2$ films onto flexible PET bottles using the fashion explained herein results in a decrease in the gas permeation characteristics of the $\rm SiO\sb2$-PET membrane as desired, but is found to be independent of the thickness of the $\rm SiO\sb2$ present. This limit is found to be caused by cracks and pinhole defects across the $\rm SiO\sb2$ film that permit uninhibited gas flow directly to the PET bottle.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Nuclear Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Turkot, Robert Bruce, Jr

Contributors dc:contributor

• Ruzic, David N.

• Engineering, Materials Science

Language dc:language

eng

Identifier

(MiAaPQ)AAI9717340

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/85931