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University of Illinois at Urbana-Champaign
Modeling of Wave Heated Discharges Used in Plasma Processing Reactors
Abstract
dc:descriptionAsymmetric antennas (m = +1,-1) produce 3-D components of the electric field lacking any significant symmetries and so must be fully resolved in 3-D. To investigate these processes, a 3-D plasma equipment model was improved to resolve 3-D components of the electric field produced by m = + 1,-1 antennas in solenoidal magnetic fields. For magnetic fields of 10--600 G, rotation of the electric field was observed downstream of the antenna where significant power deposition also occurs.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Nuclear Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Kinder Oxom, Ronald Leonel
- Contributors dc:contributor
-
- Kushner, Mark J.
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3023159
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/85890