Failure of Microelectromechanical Systems Under Dynamic Loading: An Experimental and Numerical Investigation

The response of cantilever beams, representing modle test structures, comprised of metal and ceramic layers was also investigated. Experiments were conducted using the modified split hopkinson pressure bar to investigate the effects of loading amplitude, duration, and profile on the failure of the cantilever beams. Finite element simulations of these beams were conducted to provide more detailed information regarding the deformation of the beams under the various loadings applied in the experiments. Results of the simulations were coupled with experimental measurements of failure stress (measured in quasistatic microtensile tests) in an attempt to predict failure. High-speed imaging was also used to capture the first real-time images of MEMS structures responding to dynamic loading.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Aerospace Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Kimberley, Jamie

Contributors dc:contributor

• Lambros, John

• Engineering, Mechanical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3314822

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/85111