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University of Illinois at Urbana-Champaign
Failure and Fracture of Thin Film Materials for MEMS
Abstract
dc:descriptionThe results of this research provided fundamental information about thin film failure at the scale of MEMS, which could be directly applied to perform materials selection and design of MEMS components. The experimental methods described in this thesis were shown to be entirely repeatable and directly applicable to any thin film material. Consequently, they represent a protocol with the potential to become a standardized technique for mechanical property studies at the micron and the nanometer scales.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Aerospace Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Jonnalagadda, Krishna Nagasai
- Contributors dc:contributor
-
- Chasiotis, Ioannis
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3314810
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/85109