Back to results
University of Illinois at Urbana-Champaign
Solution-Based Deposition of Ultrathin Metal Oxide Films on Metal and Superconductor Surfaces
Abstract
dc:descriptionSolution deposition from Zr4(OPrn) 16 was also used to deposit ultrathin zirconia films on gold, silver, and aluminum surfaces. X-ray photoelectron spectroscopy and atomic force microscopy were used to compare the physical properties of these films. Electrical measurements showed that zirconia films on Ag and Au are not insulating, but aluminum-zirconia-aluminum capacitors fabricated by this method displayed capacitance densities between 0.09 tauo 0.50 muF/cm2 (tan delta = 0.09 to 1.12) and current densities between 10-2 to 10-4 A/cm2.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Chemistry
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Westwood, Glenn
- Contributors dc:contributor
-
- Walter G. Kemperer
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3153460
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/84164