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University of Illinois at Urbana-Champaign
Amplification of Soft Lithographic Patterning of Silicon
Abstract
dc:descriptionThesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2002.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Chemistry
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Harada, Yoshiko
- Contributors dc:contributor
-
- Girolami, Gregory S.
- Nuzzo, Ralph G.
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3044104
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/84062