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University of Illinois at Urbana-Champaign

Fabrication, Characterization, and Transport Analysis of Silicon-Based Microsystems: Micro Fuel Cells and Micro Gas Perconcentrators

Abstract

dc:description

Second, we have developed a muGPC that helps gas detectors sniff a trace amount of toxic vapors by increasing their concentration via adsorption and thermal desorption. Integration with electrostatic microvalves enabled the muGPC to achieve extremely small dead volumes and fast injection times while the power and energy required to run a microheater, a key component of the muGPC, were kept small. Another unique feature of the muGPC is the use of an array of microposts coated with thin metal-organic framework adsorbents permitting a small pressure drop across the chamber while maintaining a large surface-area-to-volume ratio. The optimization of designing the muGPC is discussed in the context of maximizing the preconcentration factor while minimizing the energy required for operation.

Degree

thesis:*
Name thesis:degree_name
Ph.D.
Level thesis:degree_level
Dissertation
Discipline thesis:degree_discipline
Mechanical Engineering
Grantor
University of Illinois at Urbana-Champaign
Year dc:date
2015

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Yeom, Junghoon
Contributors dc:contributor
  • Shannon, Mark A.

Subjects

dc:subject × 1

Rights

Language dc:language
eng

Identifiers

dc:identifier.*
Identifier
(MiAaPQ)AAI3301254
OAI identifier oai:identifier
oai:www.ideals.illinois.edu:2142/83904

Chain of custody

source
Harvested from
University of Illinois - Urbana-Champaign
Base URL
www.ideals.illinois.edu/oai-pmh
Last updated
2026-07-22
Source record
OAI-PMH GetRecord
citation

Yeom, Junghoon. Fabrication, Characterization, and Transport Analysis of Silicon-Based Microsystems: Micro Fuel Cells and Micro Gas Perconcentrators. Dissertation thesis, University of Illinois at Urbana-Champaign, 2015. http://hdl.handle.net/2142/83904