Collocation Based Meshless Methods for Microelectromechanical Systems

After the theoretical study of the meshless methods, the FCM and boundary cloud method (BCM) were applied to solve the fluid flow in the MEMS devices. Combining the fluid flow module with the solver for the Poisson and Nernst-Planck (PNP) equations, a tool for the simulation of ion transport in the framework of the meshless methods has been developed. Furthermore, this tool has been used to study the electrokinetic transport in a hybrid micro-nanofluidic interconnect device, which is capable of controlling analyte transfer between the microchannels through a nanochannel under rest, injection and recovery stages of operation by varying the applied potential bias. During the injection stage, the phenomenon of ion accumulation and depletion is observed at the micro-nano interface region. Net volume charge in the depletion region gives rise to nonlinear electrokinetic transport during the recovery stage due to induced pressure, induced electroosmotic flow of the second kind and complex flow circulations. Analytical expressions derived for ion current variation are in agreement with the simulated results. In the presence of multiple accumulation or depletion regions, a hybrid micro-nano device can be designed to function as a logic gate.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Jin, Xiaozhong

Contributors dc:contributor

• Aluru, N.R.

• Engineering, Electronics and Electrical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3290262

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/83885