Nonlinear Dynamics of Electrostatically and Magnetically Actuated MEMS

"The multi-physical nature of microelectromechanical Systems (MEMS) makes the development of CAD tools for MEMS a challenging area. Besides, the non-linear coupling between the different physical domains in MEMS can give rise to interesting non-linear dynamic properties. These non-linear dynamic/chaotic properties of MEMS can be exploited for various applications like chaotic micro-fluidic mixers, secure communications, MEMS filters with shiftable resonant frequencies, etc. In this work, we have developed an efficient physical level simulation tool, namely, the full-Lagrangian Newton/Relaxation scheme, for the static and dynamic analysis of two popular classes of MEMS devices, namely, electrostatic and magnetostatic MEMS. This new scheme has several advantages of conventional MEMS simulation tools in terms of speed and convergence rates. The simulation tool is used to explore new nonlinear dynamic properties of electrostatic MEMS devices in this work. Complex nonlinear oscillations and the period doubling route to chaos are observed under superharmonic excitations. The presence of U-sequence in MEMS is reported for the first time. Under superharmonic excitation, the sequence is found to be a modified form of the U-sequence termed as ""UM-sequence"". The effect of these complex oscillations on thermoelastic damping (an inherent dissipation mechanism that limits the quality factor of these devices) in electrostatic MEMS is also studied."

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• De, Sudipto K.

Contributors dc:contributor

• Aluru, N.R.

• Engineering, Mechanical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3242828

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/83855