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University of Illinois at Urbana-Champaign
A Novel Method for Testing Freestanding Nanofilms Using a Custom MEMS Load Cell
Abstract
dc:descriptionFollowing fabrication, membrane thickness was measured using several methods, including: profilimetry, Scanning Electron Microscopy, and custom spectrophotometry. The mechanical properties of several membranes were measured using the apparatus, including membranes of gold, single crystal silicon, and nano-porous silicon. The elastic properties of both the gold and silicon agree with previous measurements. Interesting new behavior for each material was also observed, including a surface energy driven creep relaxation in gold membranes.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Mechanical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Leseman, Zayd Chad
- Contributors dc:contributor
-
- Mackin, Thomas J.
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3223650
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/83849