Scanning Probe Array Development for Dip Pen Nanolithography

Out of five array concepts attempted, three are practical and were demonstrated using lithography. Several packaging schemes were developed and used to install the arrays in AFMs modified for multi-probe applications. The arrays were used to write patterns of 1-octadecanethiol on gold surfaces with line widths as small as 25nm, write speeds as fast as 20mum/sec, and up to four patterns overlapping the same region.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Bullen, David Andrew

Contributors dc:contributor

• Chang Liu

• Engineering, Electronics and Electrical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3160868

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/83822