Theoretical, Experimental, and Numerical Investigations Into Laser Repair of Adhered MEMS Structures

A MEMS temperature sensor based on the buckling of fixed-fixed beams due to thermal expansion is designed, fabricated, and tested. Difficulties from fabrication including residual stress, and limited temporal and spatial resolution of the imaging system hindered the device performance, but fixed-fixed MEMS beams are used estimate the temperature difference between the beam and substrate and cooling time after laser irradiation.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Rogers, James W.

Contributors dc:contributor

• Leslie M. Phinney

• Engineering, Mechanical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3070043

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/83779