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University of Illinois at Urbana-Champaign
Electrical Properties of Nitride/oxide Multilayered Thin Films
Abstract
dc:descriptionSASAS film did not have a smoother surface compared to SiNx films. Therefore, surface roughness was not a factor for the increased dielectric strength of the multilayered films. There were no observed dielectric strength increase for the nitride/nitride, oxide/oxide multilayered films.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Materials Science and Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Chung, Hyunim
- Contributors dc:contributor
-
- Mark Shannon
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI9996622
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/82939