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University of Illinois at Urbana-Champaign
An Investigation of Flow-Limited Field-Injection Electrostatic Spraying (Ffess) and Its Applications to Thin Film Deposition
Abstract
dc:descriptionDeposition of TiO2 and silver thin films using multi jet FFESS is studied, demonstrating great control on film morphology and properties. TiO2 thin films deposited on high-intensity discharge arc lamps are found to improve the quality of its light output. Silver thin films of high purity and conductivity, and with good adhesion, could be deposited at relatively high deposition rates and high deposition efficiency as compared to CVD techniques.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Materials Science and Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Singh, Ravindra Pratap
- Contributors dc:contributor
-
- Phillip Geil
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3314959
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/82823