Proximity Field Nanopatterning, Its Optics and Applications

New techniques for three dimensional (3D) nanopatterning have been an active field of research to comply demanding complex structures and nanoscale sizes of proposed ideas and potential applications; conventional photolithography and other nanopatterning methods are useful for some of them, still, more versatile and general methods are desperately in need. Conformable phase masks and transparent photopolymers provide the basis for a simple optical technique that can form complex, but well defined 3D nanostructures in a single exposure step with incomparable depths of focus. This dissertation describes the method and presents a range of examples proving its ability to form 3D nanostructures (including free standing particles with controlled shapes and density graded materials) with computational results of rigorous coupled wave analysis. Talbot effect, key physical phenomenon behind this technique, is explored in detail, especially in wavelength comparable regime, and its variation from less coherent light source (more specifically, exposure with angular and spectral bandwidth) and response to absorptive, photo-sensitive materials greatly extend our understanding about the effect. Single step, large area of 3D patterning, sub-wavelength resolution, and experimental simplicity represent features that make this method attractive for applications in photonics, biotechnology and many other areas. We provide exemplary applications such as passive mixers in microfluidics, bandgap structures in photonics, and reservoir targets in shockless laser compression. Finally, fabrication of complete 3D photonic bandgap structures, infiltration work using patterned 3D structures as a template to achieve structures with better mechanical and optical properties, and chemical release systems for potential applications in biomedicine are discussed with some of preliminary results as ongoing work for future.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Materials Science and Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Jeon, Seokwoo

Contributors dc:contributor

• Rogers, John A.

• Physics, Optics

Language dc:language

eng

Identifier

(MiAaPQ)AAI3250264

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/82795