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University of Illinois at Urbana-Champaign
Epitaxy of Self -Assembled Nanostructures by Metalorganic Chemical Vapor Deposition
Abstract
dc:descriptionThe future of self-assembled nanostructures lies in the selective placement of individual nanostructures for applications such as integrated optoelectronics, quantum computing and quantum encryption. By utilizing InGaAs thin films, a method of selective area epitaxy has been developed. Not only is the technique better suited for self-assembled nanostructure growth and processing, but single island growth with resolutions on the order of 100 nanometers have been achieved.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Materials Science and Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Yeoh, Terence Sern-Wei
- Contributors dc:contributor
-
- Coleman, James J.
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3102002
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/82746