In Situ High-Temperature Scanning Tunneling Microscopy Studies of Early Stage Growth Kinetics During Titanium Nitride Epitaxy

During the course of my research, I have developed methods to grow atomically-smooth TiN(001) and (111) single-crystal layers with simple well-defined single-atom-high 2D island configurations on large atomically-smooth terraces. I used in situ scanning tunneling microscopy to study time- and temperature-dependent 2D island coarsening/decay kinetics, obtain 2D equilibrium island shapes, and follow temporal fluctuations of island shapes on both TiN(001) and (111) surfaces. I have developed a combination of experimental and theoretical techniques to analyze the surface dynamics measurements and determined adatom surface transport parameters, step energies, step stiffnesses, and kink formation energies on TiN(001) and TiN(111) surfaces.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Materials Science and Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Kodambaka, Suneel Kumar

Contributors dc:contributor

• Greene, Joseph E.

• Engineering, Materials Science

Language dc:language

eng

Identifier

(MiAaPQ)AAI3070354

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/82731