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University of Illinois at Urbana-Champaign
Multiscale Simulations of Nanofabricated Structures: Application to Copper Electrodeposition for Electronic Devices
Abstract
dc:description*This dissertation is a compound document (contains both a paper copy and a CD as part of the dissertation). The CD requires the following system requirements: Microsoft Office.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Chemical and Biomolecular Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Drews, Timothy Owen
- Contributors dc:contributor
-
- Alkire, Richard C.
- Braatz, Richard D.
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3131068
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/82363