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University of Illinois at Urbana-Champaign
Queueing Network Analysis of Semiconductor Manufacturing Plants
Abstract
dc:descriptionWe show how the performance bounds can be used to design wafer fabs. Specifically, one may formulate the problem as one of maximizing the performance subject to a capital cost constraint. Software has been developed both for performance bounds (called BoundFab) and for design (called DesignFab).
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Electrical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Morrison, James Robert Barrett
- Contributors dc:contributor
-
- Kumar, P.R.
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI9990090
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/81356